|
氣體種類 |
量程 |
峰值報(bào)警 |
平均閥值報(bào)警 |
危險(xiǎn)濃度報(bào)警 |
氫氣 (H 2 ) |
0...1.000 % |
- |
- |
0.01%vol |
H2 |
0...4.00 % |
- |
- |
0.05%vol |
硫化氫(H 2 S) |
0...100ppm |
10ppm |
10ppm |
2ppm |
H2S |
0...30.0ppm |
10ppm |
10ppm |
0.5ppm |
氯氣 (Cl 2 ) |
0...5.00ppm |
0.5ppm |
0.5ppm |
0.15ppm |
一氧化碳 (CO) |
0...500ppm |
30ppm |
25ppm |
10ppm |
氰化氫 (HCN) |
0...30.0ppm |
1.9ppm |
4.7ppm |
1ppm |
氯化氫 (HCl) |
0...30.0ppm |
2ppm |
5ppm |
1ppm |
HCl |
0...30.0ppm |
2ppm |
5ppm |
1ppm |
砷烷 (AsH 3 ) |
0...1.00ppm |
- |
0.05ppm |
0.03ppm |
AsH3 |
0...1.00ppm |
- |
0.05ppm |
0.03ppm |
AsH3 |
0...10.0ppm |
- |
0.05ppm |
0.5ppm |
PH3 |
0...1.00ppm |
0.10ppm |
0.30ppm |
0.05ppm |
磷烷 (PH 3 ) |
0...1.00ppm |
0.10ppm |
0.30ppm |
0.05ppm |
乙硼烷 (B 2 H 6 ) |
0...1.00ppm |
- |
0.10 ppm |
0.05ppm |
硅烷(SiH 4 ) |
0...50.0ppm |
- |
5ppm |
1.0ppm |
氟氣 (F 2 ) |
0...5.00ppm |
0.10ppm |
0.10ppm |
0.03ppm |
氟化氫(HF) |
0...10,0ppm |
2ppm |
3ppm |
0.5ppm |
氨氣(NH 3 ) |
0...50ppm |
20ppm |
25ppm |
1ppm |
NH3 |
0...1000ppm |
20ppm |
25ppm |
15ppm |
NH3 |
0...100ppm |
20ppm |
25ppm |
5ppm |
六甲基二硅(HMDS) |
0...0.500 % |
- |
- |
0.010%vol |
HMDS |
0...500ppm |
- |
- |
5ppm |
溴氣 (Br 2 ) |
0...5.00ppm |
- |
0,1ppm |
0.05ppm |
溴化氫 (HBr) |
0...30.0ppm |
2ppm |
3ppm |
1ppm |
臭氧(O 3 ) |
0...1.00ppm |
0.10ppm |
0,10ppm |
0.05ppm |
二氧化氯(ClO 2 |
0...1.00ppm |
0.10ppm |
0,10ppm |
0.03ppm |
三氟化氯 (ClF 3 ) |
0...1.00ppm |
- |
0,10ppm |
0.03ppm |
正硅酸乙(TEOS) |
0...100ppm |
10ppm |
10ppm |
5ppm |
硼酸三甲酯(TMB) |
0...200ppm |
- |
- |
5ppm |
聯(lián)氨 (N 2 H 4 ) |
0...1.00ppm |
0.10ppm |
0,01ppm |
0.02ppm |
磷酸三甲酯(TMP) |
0...30.0ppm |
- |
2,0ppm |
1ppm |
三氟化氮(NF3) |
0...50.0ppm |
- |
10ppm |
1ppm |
氟甲烷(CH 3 F) |
0...0.500 % |
- |
- |
0.010%vol | |